| 摘要 |
PURPOSE:To raise more sensitivity even if a titled thermopile has a specified occupied area by forming plural layers consisting of a thermopile formed by connecting in series plural thermocouples on an insulating substrate, and also connecting electrically the thermopiles of each layer so that all the thermocouples are connected in series to each other. CONSTITUTION:The other end of the first metallic layer 5 is connected (hot contact) to one end of the second metallic layer 7 in the center of an insulating substrate non-sticking area B. The other end of this second metallic layer 7 is extended to an insulating substrate sticking area A, and connected (cold contact) to the first metallic layer 6. An electrode B is formed on the other end of a snake motion-shaped layer on which the first metallic layer 6 and the second metallic layer 7 are placed alternately, and positioned on the insulating substrate non-sticking area B. On an insulating thin film 1 on which such a thermopile 4 is formed, an insulating layer 9 is formed so as to cover the thermopile 4. One end of a thermopile 10 consists of the first metallic layer 6, and this first metallic layer 6 is connected to an electrode 8 connected to the second metallic layer 7 through a through-hole formed on the insulating layer 9, and the other end of the thermopile 10 is connected to an electrode 11. |
