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发明名称
摘要
申请公布号
JPS59137205(U)
申请公布日期
1984.09.13
申请号
JP19830031483U
申请日期
1983.03.04
申请人
发明人
分类号
B65G15/12;B65G15/38;H01L21/677;H01L21/68;(IPC1-7):B65G15/12
主分类号
B65G15/12
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