| 摘要 |
PURPOSE:To obain a thin film magnetic head suited to the high-density which holds a coil and an insulated layer between the upper and lower magnetic layers having an open end with the other end closely adhered, by coating one of both magnetic layers with a metallic layer that is not easily etched. CONSTITUTION:A lower magnetic layer 22', a coil 24 and an insulated layer 25 are formed on a substrate 21, and an upper magnetic layer 23' which is finally used as a magnetic pole 23 is coated over the substrate 21 with a level difference (h) and about 10m thickness. Then a photoresist layer 27 having an overhang-shaped stensil D is formed with a negative relation to a magnetic pole pattern to be formed. In addition, Ti which is not easily etched to the layer 23' is vapor deposited on the layer 27 in the vertical direction to the substrate 21 to form a coated layer 28. Then the resist 27 is melted away to obtain a mask pattern 28. Using this mask 28, the layer 23' is etched by an ion milling process to obtain a pattern 23 to be finally used as a magnetic pole. In such a way, a highly accurate pattern is obtained for a thin film magnetic head suited to the high-density recording. |
