| 摘要 |
PURPOSE:To execute selectively reflection/transmission illuminations by placing plural mirrors whose reflection selecting wavelengths are different from each other, on the side opposite to a half mirror of a work, so that they can go into and out of a telecentric illuminating system. CONSTITUTION:A half mirror 6 is placed on an optical axis 13A of a magnifying projection lens 13, a projected light from the side of this mirror 6 is reflected by this mirror 6, a telecentric illuminating system for irradiating a work W placed at a focal position of the projection lens 13 is provided, and a shape of the work is magnified and made to form an image on a screen 8 from the magnifying projection lens 13 by utilizing a reflected light from the work W. Plural mirrors 14A-14C whose reflection selecting wavelengths are different from each other are placed on the side opposite to the half mirror 6 of the work W so that they can go selectively into and out of the telecentric illuminating system. The mirrors 14A-14C are placed concentrically on a rotating plate 15 so that the turret is replaced freely. |
