发明名称 GLASS MASK MANIPULATING TOOL FOR MANUFACTURING SEMICONDUCTOR
摘要 PURPOSE:To perform holding and inverting works in a stable state, by supporting holding pieces, which hold a glass mask at tip gripping parts of the main body of a mask holding tool from both outsides, so that each holding piece can be moved by a supporting shaft which is inserted through each tip gripping part. CONSTITUTION:In the main body of a mask holding tool 11, holding pieces 13, which insert and hold a glass mask 12 in recess parts 13a, are provided. The holding pieces 13 are supported by movable supporting shafts 14, which are attached to tip gripping parts 11b. A remote switch 15 is provided at grasping parts 11a. In order to rotate the glass mask by 180 deg. under the gripped state, motors 19 are rotated by the remote switch 15.
申请公布号 JPS59148338(A) 申请公布日期 1984.08.25
申请号 JP19830024184 申请日期 1983.02.14
申请人 MITSUBISHI DENKI KK 发明人 SUEHIRO KAZUTO
分类号 B25B7/02;G03F1/00;H01L21/027;H01L21/677 主分类号 B25B7/02
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