| 摘要 |
PURPOSE:To obtain a magnetic recording medium which is suitable for vertical magnetic recording at a high density and has excellent mechanical strength, chemical stability, etc. by forming a magnetic layer of a granular material consisting essentially of an iron oxide having a prescribed magnetizing characteristic. CONSTITUTION:A magnetic field is formed in the direction perpendicular to the surface of targets T1, T2 in a vacuum vessel 1 of a sputtering device to form high density plasma. The target material is deposited as a magnetic material on a substrate 6. A continuous magnetic layer 10 in which small grain lumps consisting essentially of an iron oxide are joined to the target material in the state in contact with the grain boundary is formed on the substrate 6 by using Fe (contg. 1atom% Co) and Ar+O2 for the gas to be introduced. The ratio of the residual magnetization in the direction perpendicular to the plane of the layer 10 with respect to the residual magnetization in the direction within the plane of said layer is made >=0.5. The magnetic recording medium in which the small grain boundaries are arranged in the direction perpendicular to the plane of the layer 10 and which is suitable for vertical magnetic recording at a high density and has excellent mechanical strength, chemical stability, etc. is thus obtd. |
