| 摘要 |
PURPOSE:To form a spacer, thickness thereof is very thin, in which there is no pin hole and manufactured therefor is easy, by constituting the spacer by a thin- film consisting of adhesives containing hexaalkyldisilazane. CONSTITUTION:A lower superconductor thin-film 2 in Nb is formed on a substrate 1 by using a resist mask M1. A thin-film consisting of adhesives HADS containing hexaalkyldisilazane such as hexamethyldisilazane is attached. A resist mask M2 is formed on the thin-film, Nb is attached, the mask M2 and the thin- film composed of HADS are removed, and an upper superconductor thin-film 3 is obtained. Nb is sputtered on the whole surface, and Nb is coated with an electron-beam resist mask M3. Nb except the lower section of the mask M3 is removed. A Josephson junction element in which a weak coupling section 5 couples the films 2, 3 is acquired by removing the mask M3.
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