ALUMINUM EVAPORATED LEAD FRAME

摘要

PURPOSE:To upgrade the anticorrosion of an aluminum film by a method wherein the crystal orienting property of an aluminum evaporated film is set at more than a specified value. CONSTITUTION:The film formation of an aluminum film is performed while the rate of existence of aluminum ions is controlled according to ion plating and cluster ion beam methods and the orienting degree of the film to the 111 face is set at more than 70%. Through these procedures, the corrosion resistance of the aluminum film can be remarkably improved, thereby enabling to perform a wire-bonding using aluminum wires even in a plastic package IC.