| 摘要 |
PURPOSE:To produce a magnetic recording medium having excellent vertical orientation by reducing the gas discharged from a substrate when a magnetic film is formed. CONSTITUTION:A vacuum container 1 is divided to sputtering rooms 1a and 1b by a partitioning plate 11, and these rooms have targets 7 and 7' respectively. A slit of the plate 11 has a narrow width enough to permit the pass of a base materil 9, and each sputtering room is exhausted independently. Thus the greater part of the impure gas generated within the room 1a is exhausted, and an extremely small amount of impure gas goes into the room 1b through the slit 12. Though characteristics are not so good for a magnetic thin film formed in the room 1a, the magnetic thin film formed in the room 1b receives no direct impact from flying atoms through the material 9. Thus the gas is not discharged from the material 9, and therefore a vertically magnetized film is obtained with excellent characteristics. |
