| 摘要 |
PURPOSE:To inhibit the variance of the quantity of flexure to a small value when the titled thin-film device is applied to a diaphrgam substrate for a pressure sensor by forming an insulator layer between the substrate and a conductive thin-film in a vitrified layer. CONSTITUTION:Low melting-point glass such as lead glass is applied on the surface of a stainless substrate 1 through a screen printing, a precipitation method, by a spray gun, etc. and baked to form a vitrification-treated layer 2, and a conductive thin-film element 3 and an electrode 4 are formed. When the substrate is changed into a diaphragm and applied to a resistance strain type pressure sensor, the uniformity of thickness is very excellent because the substrate 1 is rolled, and the variance of the quantity of flexure can be inhibited to a necessary value. |
