| 摘要 |
PURPOSE:To enable to detect erroneous patterns accurately and in a short time without depending on a human visual test by a method wherein, while checking the reference pattern with the part corresponding to each pattern to be tested, the automatic test is performed. CONSTITUTION:The mask pattern information is extracted from an information processing device 1 and transmitted into a figure display device 2. The dark- bright information at each part on the display surface of the device 2 is transmitted into a photoelectric conversion device 4, thus converted into an electric signal, which signal is shaped into a binary wave form in a wave form shaping circuit 5 and supplied into a summing device 9. On the other hand, each part of a mask 12 is converted into an electric signal in a photoelectric conversion device 7 then shaped into a binary wave form in a wave form shaping circuit 8 and supplied into the device 9, which device takes the exclusive logical sum of output pulses of the circuits 5 and 8. Therefore, when the both input pulses are coincident with each other, the output is 0, and the output is 1 only when different to each other. The output of the device 9 is converted into a light using a photoelectric conversion device 10 and recorded into a photo device 11. |
