| 摘要 |
PURPOSE:To measure accurately the temperature in a desired position to control it, by controlling the temperature of an object such as a board or the like with detection of a spectrum of spectral diffraction of the Raman light, amplification, conversion to temperature information, and the control of a heating means. CONSTITUTION:A coherent laser light 7 is radiated from a laser light source 6 on the outside of a bell jar 1 to a board 2 in the film forming operation. The laser light 7 is reflected on the surface of an evaporation film and is led to the outside of the bell jar 1 as a reflected light 7' and is made incident to a spectroscope 9 through a mirror 8. The reflected light 7' is attained as the Raman light, and the spectroscope 9 measures the Raman light and makes its spectrum of spectral diffraction incident to a photodetector 10. An analog signal is attained from the detector 10 and has noise component suppress by a multichannel analyzer 11 and is amplified to attain a high-S/N output signal. This signal is converted to a digital signal by an A/D converter 12 and is converted to temperature information by a personal computer 13, and an SCR power source 17 of a heater 4 is controlled through a temperature controller 15 and a gate unit 16 to control the heating temperature to a set temperature. |
