| 摘要 |
PURPOSE:To realize crystallization effectively within a short period of time by providing a conductive base material forming a guide groove at the upper surface and an insulating slide plate which is slidably arranged in the guide groove and bridging the first and second upper portions in both sides of guide groove with a conductive strip. CONSTITUTION:While a substrate 12 is placed on an insulated sliding plate 4, the substrate is put into a quartz tube 22 loading a high frequency heating coil 21 at its external circumference, the insulated sliding plate 4 is pushed and it is guided slidingly into the guide groove 3 using a pushing bar 23. Thereby, the substrate 12 is placed under a conductive strip 5. When a current is supplied to the high frequency heating coil 21, semiconductor forming a layer 11 on the substrate 12 is crystallized. The second closed current path including the external surface of conductive strip 5 ad the first closed current path not including external surface of conductive strip 5 generate heat due to Joul's loss of high frequency induced current. Thereby, the conductive strip base material 1 and conductive strip 5 generate heat. |
