| 摘要 |
PURPOSE:To prevent the falling-off or loosening of grown crystal from the supporting tool caused by the increase of the weight of crystal, and to obtain a high-quality single crystal by pulling method, by using a main crystal supporting tool composed of a side face parallel to the direction of the pulling axis and three other faces having tapered shape. CONSTITUTION:The seed crystal supporting tool attached to the lower end of the supporting rod 1 has a side face parallel to the long axis of the seed crystal and three other side faces having tapered shape. The tapered part is composed of vertically arranged two steps 6, 7, and a rod having two side faces parallel to the pulling axis and tapered faces 8 opposite to the parallel faces for alignment is attached to the lower end of the tapered part 6, 7. The length of the tapered part 6, 7 (l1) is made shorter than the length of the tapered face 8 (l2). The centers and directions of the pulling axis and seed crystal can be aligned by the process, and a high-quality single crystal can be produced. |
