| 摘要 |
PURPOSE:In thermal decomposition of a silane compound by plasma flame in a gaseous phase, to prepare finely divided particles of beta-type silicon carbide in high reactivity in high formation rate, by introducing a raw material gas into the central part of the plamsa flame. CONSTITUTION:(A) A gas of an organosilane shown by the formula I [R is H or monofunctional hydrocarbon group (at least one is monofunctional hydrocarbon group); n is 1-4], and/or (B) a mixed gas of a silane shown by the formula II(m is 0-4) and a volatile hydrocarbon compound is used as a raw material gas. Namely, argon is introduced from the plasma inlet pipe 2 to the reaction pipe 5, high-frequency power (about 0.5-10MHz, about 1-100kW) is applied to the high-frequency work coil 6 to generate the plasma flame 9. The raw material gas is introduced from the pipe 1 to the central part of the plasma flame 9 (flow velocity: about 1-4m/sec.), and finely divided particles of silicon carbide are dropped into the particle collecting part 7. |
