发明名称 |
MANUFACTURE OF ELECTROPHOTOGRAPHIC SENSITIVE SHEET |
摘要 |
PURPOSE:To form a uniform vapor deposited film on many substrates by fitting a shaft body into the through-hole of the axial center of a polygonal column having a substrate sheet attached on each side face and heating the substrates with heat transferred from said shaft body and vapor-depositing the films on the substrates while rotating the shaft body. CONSTITUTION:Substrate sheets 4 are fixed to the side faces of a polygonal column 2 having a through-hole 3 in the axial center, and a shaft body 1 rotatably fixed to the base of a vacuum vessel is fitted into the through-hole 3. The substrate sheets 4 on the column 2 is heated with heat transferred from a heater 5 to a prescribed temp., and a vapor deposited films are formed on the surfaces of the sheets 4 by rotating the body 1 and evaporating an evaporation material placed on a boat 6. |
申请公布号 |
JPS59126541(A) |
申请公布日期 |
1984.07.21 |
申请号 |
JP19830001456 |
申请日期 |
1983.01.08 |
申请人 |
FUJI DENKI SEIZO KK |
发明人 |
NAKAJIMA MASAO;NAKAJIMA HEIJI |
分类号 |
G03G5/082;(IPC1-7):03G5/082 |
主分类号 |
G03G5/082 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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