| 摘要 |
PURPOSE:To improve the yield of a solar battery of a substrate by forming solar batteries on the front and back surfaces of a solar battery substrate respectively. CONSTITUTION:Stainless substrates 1 are held by holders 2 serving as high frequency electrodes, and then heated to approx. 250 deg.C by an electric furnaces 3. Reaction gas is introduced from one side of a reaction tube 4 and exhausted out of the opposite side. In the state that SiH4 and B2H6 are passed at the rate of B2H6/SiH4=10<-2> under the pressure of e.g. 1 Torr, high frequency glow discharge is caused, thus forming P type layers 5 and 5'. Successively, after once evacuation the pressure is restored to 1 Torr, only the SiH4 is passed, causing high frequency glow discharge, and accordingly non-doped layers 6 and 6' are manufactured. Finally, high frequency glow discharge is caused in the state that SiH4 and PH3 are passed at the rate of PH3/SiH4=10<-2> under the pressure of 1 Torr, resulting in the manufacture of N type layers 7 and 7'. |
