| 摘要 |
PURPOSE:To position accurately a hard dry plate by arranging positioning pins corresponding to the sizes of plural dry plates to be exposed, changing the pressure in a gas passage according to the size of a dry plate to be exposed, and projecting the positioning pins from a sampling table selectively. CONSTITUTION:A table 6 is provided with centering mechanisms 20a, 20b- at positions corresponding to specific holes 10a, 10b- corresponding to the sizes of hard dry plates. The centering mechanisms 20a-20c are for a 4-inch hard dry plate, the centering mechanisms 20d-20f are for a 5-inch hard dry plate, and centering mechanisms for other large-sized hard dry plates are arranged successively. The centering mechanism 20a is provided with a gas passage 11 and a changeover switch 12, and the flow passage 11 is linked to, for example, a gaseous N2 gas supply source, etc.; and the changeover switch 12 is given with recognition codes corresponding to the sizes of dry plates to be processed and the switching of the switch for a necessary hard dry plate is recognized easily. |
