| 摘要 |
PURPOSE:To permit easy and quick mounting and dismounting of a base plate to and from a base plate receiver in a device of a confronting target system by providing attachably and detachably a base plate mounter to the base plate receiver. CONSTITUTION:A hole 41 having a collar 40 formed with a notch 42 is bored to a base plate receiver 13' disposed to a base plate receiving base 12 of a device of a confronting target system. A pawl 52 which is insertable and removable into and from said notch 42 and is rotatably along the collar 40 is provided to a substrate mounter 50 provided attachably and detachably to the receiver 13'. A spring 60 which presses said pawl 51 to the collar 40 is provided to the receiver 13'. The mounting and dismounting of a base plate 31 to and from the receiver 13' are easily accomplished by the above-mentioned sputtering device and the time for operation is reduced. |
