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发明名称
TREATMENT OF WASTE GAS FROM DRY ETCHING
摘要
申请公布号
JPS59109227(A)
申请公布日期
1984.06.23
申请号
JP19820218543
申请日期
1982.12.14
申请人
SHOWA DENKO KK
发明人
TAKAYAMA SHIGERU
分类号
B01D53/68;B01D53/34
主分类号
B01D53/68
代理机构
代理人
主权项
地址
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