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发明名称
Verfahren zum Herstellen von hochreinem Halbleitermaterial durch Abscheidung aus derGasphase
摘要
申请公布号
DE1240818(B)
申请公布日期
1967.05.24
申请号
DE196300S4331
申请日期
1963.03.23
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
KERSTING ARNO
分类号
C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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