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发明名称
VAKUUMAUFDAMPFANLAGE MIT EINER VENTILKAMMER, EINER BEDAMPFUNGSKAMMER UND EINER VERDAMPFERKAMMER.
摘要
申请公布号
CH643598(A5)
申请公布日期
1984.06.15
申请号
CH19800004600
申请日期
1980.06.16
申请人
LEYBOLD-HERAEUS GMBH
发明人
PETER MAHLER
分类号
C23C14/32;C23C14/00;C23C14/24;C23C14/56;(IPC1-7):C23C13/08
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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