A METHOD OF ENHANCING THE CONTRAST OF IMAGES AND MATERIALS THEREFOR

摘要

The sharpness of an image produced in a layer of photoresist by imagewise exposure of said layer from a light source emitting light of a predetermined wavelength is improved by providing a contrast-enhancing layer comprising a photobleachable compound between the light source and the photoresist layer. The photobleachable compound is sensitive to light having the predetermined wavelength, and has a ratio of extinction coefficient to molecular weight greater than 10 liters per gram-cm when in the unbleached state, and a ratio of extinction coefficient for the unbleached state to extinction coefficient for the bleached state greater than 10. Aryl nitrone compounds are specified for this purpose; specific nitrones are claimed per se. The resulting photoresist images are suitable for the production of integrated circuits.