| 摘要 |
PURPOSE:To stabilize the output and directivity of a laser light without affecting the influence of the environmental temperature to connecting rods by forming the connecting rods of a material which has a low thermal expansion coefficient, covering the outer peripheral surface with a thermally insulating material, and inserting it into the pipe for flowing cooling fluid. CONSTITUTION:Since connecting rods 8... are formed of a material which has a low thermal expansion coefficient, the rods are hardly deformed by the variations in the environmental temperature, and since the parts disposed in pipes 12... are maintained at the constant temperature by gas controlled in temperature and pressure supplied to the pipes 12..., they are hardly affected by the influence of the variations in the environmental temperature. Further, since the parts disposed in the pipes 12... of the rods 8... are covered with thermally insulating materials 11, the temperature distribution of the parts disposed in the pipes 12... of the rods 8 hardly become irregular. Since gases controlled in temperature and pressure are supplied to four pipes 12... in parallel from a supply source, almost no difference are in the temperatures and the flow rates of the gases supplied into the pipes 12.... |
