| 摘要 |
PURPOSE:To make a conductive wiring part and an insulator part in high level potential distinguishable in an easy manner, by using the output signal of an energy analyzer obtainable from the extraction range scanning of a potential image by electron beams more than two times, for extracting the potential image at the extraction range. CONSTITUTION:An electron beam 8 is swept and scanned in the potential image extraction range of a semiconductor element 9, causing an insulator at the extraction range to produce the magnetic charge. Then, a switch SW1 is switched over to a DC power source E1, impressing the positive voltage to a drawing grid 11 and producing the scanning of a potential image extraction range by the first time electron beam. After the first time potential image intake process, the second time process takes place in the same manner. Afterward, data out of memories 16 and 17 are transmitted to a picture data processing circuit 18 and thereat a different position between the first time intake data and the second time intake data commensurate to these data is found, then when the output is displayed on a picture display unit 19, the Al wiring and the insulator of the semiconductor element 9 can be displayed upon clear discrimination. |
