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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPS5993879(A)
申请公布日期
1984.05.30
申请号
JP19820202448
申请日期
1982.11.18
申请人
YOKOGAWA HOKUSHIN DENKI KK
发明人
KAWAI TAKASHI
分类号
C23C18/12;B32B9/04
主分类号
C23C18/12
代理机构
代理人
主权项
地址
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