| 摘要 |
PURPOSE:To prevent the contamination of the window of a vacuum vessel by gushing material, vapor, etc. in a device for performing laser working by disposing a movable transparent plate-like body between said window and an object to be worked. CONSTITUTION:A laser beam 2 emitted from a laser source 1 irradiates through the window glass 3 provided on the wall 4 of a vacuum vessel on an object 5 to be worked disposed in the vacuum vessel, whereby laser working is progressed. A rectangular glass plate 6 is supported by a support rod 11 between the glass 3 and the object 5 so that the glass plate can be longitudinally moved on rolls 12. The transparent plate-like body 6 made of glass is slightly shifted and is used in the succeeding laser working when it is contaminated by the spatters deposited and stuck thereon by the laser working. |
