| 摘要 |
PURPOSE:To improve yield and reliability largely by coating the surface with a first metallic layer, coating the layer with a second metallic layer, chemical property thereof differs from that of the first metallic layer, and coating the second metallic layer with the same metal as the metal of the first layer or a metal, chemical property thereof differs from that of the second metallic layer, as the metallic layer of a third layer and forming three-layer structure. CONSTITUTION:A metal, which is fast stack excellently to an insulating substrate 1 and can be in ohmic-contact with a photosensor, such as a Ni-Cr alloy is used as the evaporating first metallic layer 3 in order to form a wiring group supplying a photosensor element group 2 with electricity. An element such as Au is evaporated on the first metallic layer 3, and the second metallic layer 4 is formed. On a reference to Fig. D, the same metal as the first metallic layer 3 such as a Ni-Cr alloy or the metal, chemical property thereof differs from that of the second metallic layer 4, such as Al is evaporated on the second metallic layer 4, and the third metallic layer 5 is formed, and a wiring group 9 is formed through a method such as photoetching. An alloy such as the Ni-Cr alloy is evaporated on the second metallic layer 4 from an upper section thereof, the third metallic layer 5 is removed, and an insulating layer 6 and an element such as Au of excellent soldering property on the Ni-Cr alloy, thus forming an upper layer wiring 8. |
