| 摘要 |
PURPOSE:To ensure continuous operations for a long period of time by sending or receiving semiconductor devices by shifting semiconductor carriers with a carrier without relation to receiving and sending part of conventional semiconductor manufacturing apparatus, simultaneously storing process data depending on semiconductor carrier working process to a nonvolatile storage of carrier and executing automatic charging to said carrier. CONSTITUTION:A robot 3 for industrial use is installed to a table 2b of a charging carrier 2 and a holding part 3a holds a semiconductor carrier 5 providing wafer 4 disposed on the table 2b and is capable of sending or receiving it to the carrier receptor of semiconductor manufacturing apparatus 1. The one side of carrier 5 is provided with programmable nonvolatile storage 6, this storage stores inside thereof the processing data, completion data and transfer data when the carrier receives or sends the processing data by the processing of wafer 4, and such data can be sent or received between the semiconductor manufacture apparatuses 1. The apparatus 1 and charging carrier 2 are connected electrically with a central computer 7. Thereby, these are concentratedly controlled and process data can be sent or received between them. |
