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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPS5989774(A)
申请公布日期
1984.05.24
申请号
JP19820198755
申请日期
1982.11.10
申请人
MITSUBISHI DENKI KK
发明人
ITAKURA HIDEAKI;YONEDA MASAHIRO
分类号
C23F4/00;C23F1/08;H01L21/302;H01L21/306;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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