| 摘要 |
PURPOSE:To facilitate the inspection by a probe of a probe card during the pause of electric characteristic check by providing inspecting electrodes which are smaller than the probe end of the card on a semiconductor substrate in the same arraying position as the electrodes of a semiconductor device and providing a detector connected between the detecting electrodes. CONSTITUTION:The structure of a detector 1 is formed of an insulator 7 and a conductor 8, the size of a detecting electrode 4 is smaller than the end of a probe 6 of a probe card 5, and the electrode is disposed in the same arraying position as the electrodes of a semiconductor device 2 at the position. The electrode 4 is connected by the conductor 8 in the detector 1. The detector 1 is simultaneously formed in the step of manufacturing the device 2 on a semiconductor substrate 3. At this time, the electrode 4 is desired to have an area approx. by half or lower of the probe 6. The smaller the electrode 4 is as compared with the probe 6, the higher the accuracy of detecting the position of the probe 6 becomes. When the electrode 4 is smaller at this time, the contacting resistance value becomes high even if the probe 6 is not displaced, and the contacting resistance value to the size of the electrode 4 should be identified. |
