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经营范围
发明名称
COATER FOR SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPS5982975(A)
申请公布日期
1984.05.14
申请号
JP19820193201
申请日期
1982.11.02
申请人
NIPPON DENKI KK
发明人
AMAI HIDEMI
分类号
B05C11/08;H01L21/312
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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