| 摘要 |
An optical probe, having particular application in contour mapping and small distance gauging, includes a light generation and projection means 14, 17 which projects a light beam 16 through crossed cylindrical lenses 18, 20 to induce astigmatism in the beam. The astigmatic beam is then directed onto a target surface 30 to be mapped. The back-scattered radiation 32 reflected from the target surface is collected by a collection means 34 and focused onto a photodetector 36. The shape of the image projected onto the photodetector is dependent upon the distance between the probe and surface. By observing the output of the detector the distance between the probe end surface may be measured, or maintained constant, and a contour map generated using known mapping techniques. In an alternative embodiment, astigmatism is induced in the reflected beam, instead of in the incident beam. <IMAGE> |
