摘要 |
PURPOSE:To form a stable Ru coating with high adhesive strength on a substrate having cation exchanging power by immersing the substrate in a heated soln. contg. an Ru salt, a hydroxylamine salt and ammonia and by further immersing it in an aqueous borohydride soln. of a specified pH. CONSTITUTION:An Ru adsorbing bath is prepared by blending prescribed amounts of an Ru salt, a hydroxylamine salt, an aqueous ammonia soln. and water together and by heating or boiling the blend. A substrate having cation exchanging power such as a cation exchange membrane is immersed in the bath, and it is further immersed in an aqueous soln. of a borohydride such as sodium borohydride adjusted to 10-13pH at room temp. -60 deg.C to deposit Ru by reduction. By this coating method adion in the adsorbing stage is stabilized, and adsorbing power and reproducibility are improved. |