发明名称 METHOD FOR COATING RUTHENIUM
摘要 PURPOSE:To form a stable Ru coating with high adhesive strength on a substrate having cation exchanging power by immersing the substrate in a heated soln. contg. an Ru salt, a hydroxylamine salt and ammonia and by further immersing it in an aqueous borohydride soln. of a specified pH. CONSTITUTION:An Ru adsorbing bath is prepared by blending prescribed amounts of an Ru salt, a hydroxylamine salt, an aqueous ammonia soln. and water together and by heating or boiling the blend. A substrate having cation exchanging power such as a cation exchange membrane is immersed in the bath, and it is further immersed in an aqueous soln. of a borohydride such as sodium borohydride adjusted to 10-13pH at room temp. -60 deg.C to deposit Ru by reduction. By this coating method adion in the adsorbing stage is stabilized, and adsorbing power and reproducibility are improved.
申请公布号 JPS5980769(A) 申请公布日期 1984.05.10
申请号 JP19820191226 申请日期 1982.10.30
申请人 KOGYO GIJUTSUIN (JAPAN) 发明人 TORIKAI EIICHI;KAWAMI YOUJI;TAKENAKA HIROTAKA
分类号 C23C18/08;C23C18/44 主分类号 C23C18/08
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