| 摘要 |
PURPOSE:To improve still durability by forming a thin org. material layer, preferably, an organometallic layer polymerized by the plasma polymn. method between a substrate and a thin ferromagnetic metallic layer. CONSTITUTION:The inside of a reaction vessel R is evacuated to <=10<-3>Torr, and gaseous monomer and carrier are introduced into it in a mixed state. Vacuum in the vessel R is maintained in 0.01-10Torr. When the moving speed of a tape substrate and the flow rate of said gaseous mixture is made stable, high frequency power supply is turned on, and a plasma polymer film is attached to the substrate. The plasma polymer film having an aimed >=1nm thickness is obtained by controlling at least one of the gas flow rate, reaction time, and the moving speed of the substrate. Then, the substrate is subjected to treatment of vapor deposition to form a thin ferromagnetic metallic film on said film. As the gaseous monomer, general org. compds. including organometallic compds. having plasma polymerizability are usable. As the organometallic gas, org. compds. of tin, titanium, etc. are usable, so long as they are plasma polymerizable. |
