| 摘要 |
PURPOSE:To stabilize discharge in a discharge section by supplying the discharge section with a buffer gas for discharge through a vacuum heat-insulating chamber while evacuating the buffer gas for discharge through the discharge section. CONSTITUTION:A gas supply system 3 is connected to a vacuum heat-insulating chamber 13 through a gas supply pipe 20, and a rotary pump 4 for an air pump is each connected to the vacuum heat-insulating chamber 13 through a forked branch pipe 21 and a space section 22 communicated with a discharge section 2 in a ceramic pipe 1 through an anode 5. The arrangement of the gas supply system 3 and the rotary pump 4 is replaced, and the pressure distribution of the high pressure of the discharge section 2 and the low pressure of the vacuum heat-insulating chamber 13 is reversed while the rotary pump 4 is shared to the evacuation of impurity gases in the vacuum heat-insulating chamber 13 and the discharge section 2. Accordingly, the pressure of the discharge section can be made layer than the vacuum heat-insulating chamber while it can be kept at gas pressure required for laser oscillation at all times, thus stabilizing discharge in the discharge section without hermetically sealing the vacuum heat-insulating chamber. |
