METHOD FOR THE FORMATION OF SURFACE RELIEF PATTERNS USING DEEP ULTRAVIOLET RADIATION EXPOSURE OF RESIST COMPOSITION,申请号GB19810020305-传众专利搜索

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发明名称	METHOD FOR THE FORMATION OF SURFACE RELIEF PATTERNS USING DEEP ULTRAVIOLET RADIATION EXPOSURE OF RESIST COMPOSITION
摘要
申请公布号	GB2079481(B)	申请公布日期	1984.05.02
申请号	GB19810020305	申请日期	1981.07.01
申请人	RCA CORP	发明人
分类号	H02G15/08;G03F7/012;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G03C5/16	主分类号	H02G15/08
代理机构		代理人
主权项
地址

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