| 摘要 |
PURPOSE:To enable changing of the etching rate of objects to be etched while etching continuously the many objects to be etched by dividing ejection nozzles for an etching liquid to plural sets of groups and controlling the ejection rate of the etching liquid by each of the groups. CONSTITUTION:An etching machine has an etching chamber 1, plural sets of ejection nozzles 3 for an etching liquid mounted therein, and a mechanism for moving objects 4 to be etched in an arrow direction in the chamber 1. The nozzles 3 are divided to, for example, four groups; the top and bottom on the side where the objects 4 enter and the top and bottom on the side where the objects emerge. The rate of the etching liquid to be ejected therefrom is controlled by each of the groups. For example, the rate of the etching liquid to be ejected from the top and bottom on the side where the objects 4 enter is set at a prescribed rate and the rate of the etching liquid to be ejected from the top and bottom on the side where the objects emerge is changed. |
