| 摘要 |
PCT No. PCT/JP81/00094 Sec. 371 Date Dec. 18, 1981 Sec. 102(e) Date Dec. 18, 1981 PCT Filed Apr. 21, 1981.A dehydrating drier is so arranged that the dehydrated and dried members in a thin form, such as silicon wafers, glass for liquid crystal, photo masking glass or lenses, are rotated with a rotor, and deflectors are disposed in a ventilation channel for a flow of drying gas which reaches the dehydrated and dried members. Preferably, the deflectors are disposed substantially concentrically to the ventilation channel. Furthermore, the improved dehydrating drier also includes an electricity remover for removing charged electricity on the members. In addition, high voltage electrodes of the electricity remover of an electric type are preferably disposed substantially concentrically to the ventilation channel upstream in the path of the flow of drying gas before reaching the members. In this manner, a dehydrating drier is provided such that with a simplified structure, drying gas uniformly hits all the members so as to achieve a uniformly dried condition, and a reduction in yield of the products or a deterioration in quality due to generation of static electricity is completely prevented.
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