| 摘要 |
PURPOSE:To permit precise temperature control of an electric furnace by a construction wherein the furnace core comprises four heating portions independently controlled in its section perpendicular thereto, and the hot zone has a square section. CONSTITUTION:A graphite boat 22 is placed in a quartz reaction tube 21 and quartered heaters 23-36 are disposed as shown. These heaters 23-26 are independently controlled by a controller. Use of this electric furnace enables X- direction control with the heaters 23 and 24 as well as Y-direction control with heater 25 and 26. Since the hot zone is designed to have a square section, distances from the respective heaters 23-26 to the corresponding surfaces of the boat 22 becomes equal to one another, thus making it possible to perform precise temperature control on demand. |
