发明名称 |
Fluxless bonding of microelectronic chips. |
摘要 |
Indium is used to bond semiconductor lasers to their heat-sinks without the presence of a corrosive liquid flux. Fluxless bonding is achieved in a vacuum chamber (18) in reducing ambients of CO or H2. Low strain bonds are achieved at bonding temperatures of approximately 180-240 DEG C in CO and 220-230 DEG C in H2. Void-free bonds are achieved in CO at temperatures as low as about 205 DEG C. The technique is applicable to other microelectronic chips such as LEDs, for example. |
申请公布号 |
EP0106598(A2) |
申请公布日期 |
1984.04.25 |
申请号 |
EP19830305866 |
申请日期 |
1983.09.29 |
申请人 |
WESTERN ELECTRIC COMPANY, INCORPORATED |
发明人 |
HENEIN, GERARD EDMOND;HEPPLEWHITE, RALPH THOMAS;SCHWARTZ, BERTRAM |
分类号 |
H01L21/52;B23K1/00;H01L21/60;H01S5/00 |
主分类号 |
H01L21/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|