GENERATION METHOD OF ELECTRON BEAM WITH HIGH STABILITY AND HIGH INTENSITY

摘要

PURPOSE:To generate an electron beam with high stability and high intensity by flash-heating a field emitter of transition metal carbide crystal to a high temperature under a high vacuum prior to its use. CONSTITUTION:In order to clean the surface of a field emitter of a single crystal of a transition metal carbide, it is flash-heated to 1,800 deg.C or above under a high vacuum of 10<-9>Torr or above. Accordingly, a noise of the radiation current is made about 0.5% or less of the radiation current, and the decreasing rate of the radiation current becomes about 2% or less per hour, thus an extremely stable electron beam can be obtained.