| 摘要 |
PURPOSE:To measure carrier distribution on the sample surface with a reflected light by fixing a sample and a detector on the board which rotates concentrically against a fixed light source and rotatingly moving them with a driving system having a rotating angular ratio of 1:2. CONSTITUTION:The light 2 radiated from a light source 1 enters a sample 4 from the direction of arrow 3, the reflected light advances in the direction of arrow 5 and then enters a detector 12 on a rotating table 12. When the sample 4 is placed on the plate 11 and is rotated in the direction of arrow 8 using a driving system in the rotating angle ratio of 1:2 in order to change 7 the light entrance angle, the detector 6 on the concentrical plate 12 also rotates in the direction of arrow 9, the detector 6 rotates accurately for 20 for the rotating angle 0 of the sample 4, and the reflecting surface of sample 4 is accurately matched with the center of rotation and therefore the light always enters the measuring point. A fixed plate and a polarizer 10 on the rotating table 12 controls polarization of the entering light beam and reflecting light beam. Here, the reflected light beam is observed by irradiating the sample wafer surface with the infrared ray. The polarizing condition of reflected light beam changes sensitively in accordance with carrier distribution on the surface and thereby carrier distribution can be measured with such structure. |
