发明名称 CONVEYER APPARATUS
摘要 PURPOSE:To improve the operability, durability and reliability of a conveyer mechanism by disposing belt feed means for driving a pair of conveying belts for transporting sample and means for driving sample attaching and detaching means mounted on the other end of the conveying belts. CONSTITUTION:Sprockets 16 engaged with at least one pair of flexible conveying belts 13 are rotated by means comprising a worm wheel 22, worm gears 24, 25, a blet driving shaft and so on to let out and take up the belts 13. Sample is attached and detached by an attaching and detaching mechanism 20 comprising at attaching and detaching finger 17, a holder 18, a slider 19 and so on, which is disposed on the other end of the belt 13. The gear 24 is moved on the driving shaft 23 to rotate the sprocket 16 interlocking with the gear 24, so that the conveying belt 13b is moved independently to move the slider 19, thereby opening and closing the attaching and detaching finger 17. Thus, the conveying apparatus is reduced to a compact size even if the conveying distance is long, and the operability of the conveying mechanism can be improved.
申请公布号 JPS5969305(A) 申请公布日期 1984.04.19
申请号 JP19820178415 申请日期 1982.10.13
申请人 HITACHI SEISAKUSHO KK 发明人 KUBOTA SHIGEO;SUZUKI KEIZOU;NISHIMATSU SHIGERU;TAKAHASHI TOSHIO;NINOMIYA TAKESHI;KONDOU YOSHIMASA;MATSUO AKIHIKO
分类号 H01L21/677;B65G25/06;H01L21/302;H01L21/3065 主分类号 H01L21/677
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