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发明名称
ELLIPSOMETRISCHES VERFAHREN UND ELLIPSOMETRISCHE VORRICHTUNG ZUR UNTERSUCHUNG DER PHYSIKALISCHEN EIGENSCHAFTEN DER OBERFLAECHE EINER PROBE.
摘要
申请公布号
AT6888(T)
申请公布日期
1984.04.15
申请号
AT19800101993T
申请日期
1980.04.14
申请人
STENBERG, JOHAN EMANUEL, DR.-ING.;STIBLERT, LARS BERTIL;SANDSTROEM, ERLAND TORBJOERN
发明人
STENBERG, JOHAN EMANUEL, DR.-ING.;STIBLERT, LARS BERTIL;SANDSTROEM, ERLAND TORBJOERN
分类号
G01B11/06;G01N21/21;(IPC1-7):G01N21/21
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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