发明名称 |
METHOD AND APPARATUS FOR FORMING THIN FILM OXIDE LAYERS USING REACTIVE EVAPORATION TECHNIQUES |
摘要 |
<p>Apparatus and method for forming high quality thin film oxide layers on a substrate by a reactive evaporation process utilizing an oxygen plasma activation source in the form of a cylindrical boule of insulating material surrounded by a radio frequency coil for generating a radio frequency electromagnetic field in the boule of sufficient magnitude to create a self-igniting oxygen plasma within the boule without evaporating material from the walls thereof.</p> |
申请公布号 |
CA1164407(A) |
申请公布日期 |
1984.03.27 |
申请号 |
CA19810387313 |
申请日期 |
1981.10.05 |
申请人 |
OPTICAL COATING LABORATORY, INC. |
发明人 |
GUREV, HAROLD S. |
分类号 |
C23C14/00;(IPC1-7):C23C15/00 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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