摘要 |
PURPOSE:To reduce power and to quicken a rise time, by changing a conductance between a sub-box and a cabinet while keeping the inside of the cabinet in a gas and liquid two-phase equilibrium so as to keep a pressure in the cabinet a constant value. CONSTITUTION:Liquids 33, 33' of a freon 113 are put in the cabinet 31 and the sub-box 34. The temperature of the sub-box 34 is kept at a temperature slightly higher than the boiling point 47.6 deg.C of the freon 113 with a heater 36 and the inner pressure is higher than 1atm. Since the cabinet 31 is not temperature- controlled, the temperature is a room temperature and a saturated vapor pressure is lower than 1atm. A pipe 38 connecting the both is provided with a valve 37 having a pressure adjusting mechanism and the vapor in the sub-box 34 is delivered into the cabinet 31 so that the pressure in the cabinet 31 is balanced always with the external pressure. Since the temperature of the cabinet 31 is lower than the boiling point the liquid is condensed eventually and the pressure in the cabinet 31 is balanced to the external pressure at all times by supplying the vapor equal to the condensed amount. |