摘要 |
PURPOSE:To easily control the Te concn. profile of a photoreceptor, to render crystallization difficult, and temp. control of an evaporation source easy, and to greatly enhance yield, by preparing a multilayer photoreceptor from one evaporation source. CONSTITUTION:A starting material 4 of high Te concn. is placed in a vessel 3 as a lower layer, and that 5 of low Te concn. is put in as a higher layer, and a heater 6 is arranged right above the vessel 3. In filling the material, the lower layer 4 is melted in vacuum, and cooled, then, the upper layer 5 is filled. The upper layer 5 is first heated with the heater 6 from above and evaporated, allowed to fly from the opening 7 of the evaporation port 1, and a charge transfer layer of low Te concn. is formed on a substrate 2 to a prescribed thickness. The lower layer 4 is successively heated and evaporated to form a charge generating layer on this layer to a prescribed thickness, thus preparing a photoreceptor having high sensitivity and low fatigue. |