| 摘要 |
PURPOSE:To prevent the inclusion of the outside air from the opening of a horizontal core tube and prevent any contamination thereby, by introducing a source gas into the core tube from the opening thereof. CONSTITUTION:An injector 17 constituted by a quartz tube having an outside diameter of 10mm.phi and a length of 1.5m and provided in its side surface with bores of 1.5mm.phi which are opened at a spacing of 2cm is attached to a quartz core tube 1 having an inside diameter of 130mm.phi and a length of 2m from an opening 6 thereof. The core tube 1 is supplied with nitrogen as a source gas 3 through the injector 17. By thus introducing the source gas 3 from the opening 6 side, the source gas 3, which is exhausted in a low-temperature state, can be introduced into the core tube 1 without passing through any high-temperature part. |
