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经营范围
发明名称
BILEVEL ULTRAVIOLET RESIST SYSTEM
摘要
申请公布号
GB8401558(D0)
申请公布日期
1984.02.22
申请号
GB19840001558
申请日期
1984.01.20
申请人
WESTERN ELECTRIC CO INC
发明人
分类号
G03C1/00;G03F7/00;G03F7/095;H01L21/30;(IPC1-7):G03F7/26
主分类号
G03C1/00
代理机构
代理人
主权项
地址
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